✅ The Challenge
A Tier-1 semiconductor manufacturer in Japan was seeking a safer, high-performance acid for precision wafer cleaning during IC fabrication. Their process involved:
- Sub-28nm node copper interconnect layers
- Strict metal ion contamination thresholds (sub-ppb level)
- Need to eliminate sulfuric acid-based cleaning due to safety and corrosion concerns
- Sourcing inconsistency for high-purity acid impacted bath life and device yield
They required a non-oxidizing, low-corrosive acid with high metal compatibility and purity exceeding 99.9%, for use in post-CMP and pre-diffusion cleaning steps.
🧪 The Solution
HoriazonChemical supplied ultra-high-purity Methanesulfonic Acid (MSA) specifically purified for semiconductor-grade cleaning applications:
- Assay: ≥ 99.9% (GC)
- Metal ion content: <1 ppb for Fe, Na, K, Cu, Zn
- Sulfate, nitrate, and chloride: below detection limits
- Packaging in fluorinated drums, nitrogen purged
- Full documentation
- Provided technical collaboration for bath formulation and post-CMP cleaning steps
Pilot integration was performed in a copper/low-k process line in a 300mm fab.
📈 The Results
✔️ Metal Ion Contamination Reduced by 90%
Bath ICP analysis confirmed <0.1 ppb residuals after 100 cycles.
✔️ Improved Copper Surface Quality
Wafer surface roughness (Ra) consistently <0.3 nm, with excellent wettability.
✔️ Extended Bath Life
Up to 30% longer bath service time compared to sulfuric-peroxide system.
✔️ Safety and Equipment Compatibility Improved
MSA’s low vapor pressure reduced acid misting and improved tool life.
💬 Client Testimonial
“HoriazonChemical delivered a level of purity and support that matched our Tier-1 fab standards. Their MSA has become integral in our post-CMP cleaning process.”
— Senior Process Engineer, Japanese Semiconductor Fabricator
🧼 Purity That Powers Precision
HoriazonChemical’s ultra-pure methanesulfonic acid enables advanced chipmakers to improve wafer surface quality, reduce metallic contamination, and optimize process safety. Reach out to us for quotes, product information, sample requests, or technical support. Our team will respond within 24 hours.